I-WF6 isetshenziswa kakhulu njengento eluhlaza yenqubo ye-chemical vapor deposition (CVD) ye-metal tungsten embonini ye-electronics. I-WSi2 eyenziwe nge-WF6 ingasetshenziswa njengento yokufaka izintambo kumasekethe amakhulu ahlanganisiwe (LSI), futhi ingasetshenziswa njengempahla eluhlaza yama-electrode e-semiconductor, i-fluorine Raw materials for chemical agents, polymerization catalysts, optical materials, njll.